Finite element simulations of structural members are a good alternative to physical testing for studying strength and structural response of the members when finite element models have been properly calibrated and validated. Published information on finite element modeling of cold-formed steel deck in bending is scarce. This paper presents the development of finite element models of corrugated steel deck in bending using a general-purpose software, ANSYS. Effects of the following parameters on elastic buckling and ultimate moments of models, as well as on their load-deflection curves, were studied: shell element types, mesh density, corner radius, number of deck corrugations, presence of transverse ties, initial geometric imperfection distribution and magnitude, deck boundary conditions, loading type, and stress-strain diagrams. Optimal parameters of the models were determined. Moment capacities, flexural stiffness, and load-deflection curves predicted by the models with the optimal parameters correlated well with test results available in literature, especially when the deck material behavior was described by nonlinear stress-strain diagrams. The developed FE models can be used for studying flexural strength and behavior of solid steel deck with various geometry under various loading types, which can be useful in development of new efficient profiles and in improving the current deck design methods. The models can also be used as a basis for the development of FE models of steel deck with openings and acoustical perforations, as well as built-up deck profiles, design methods for which are currently underdeveloped.